Microfluidic devices manufacturing combining stereolithography and pulsed laser ablation

Liquid-Phase Pulsed Laser Ablation

Pulsed Laser Ablation Deposition and Laser Interaction with Materials

PULSED LASER ABLATION DEPOSITION AND LASER INTERACTION WITH MATERIALS 2.

Interface kinetics during pulsed laser ablation

This work investigates evaporation kinetics — the relation between the surface temperature and pressure during excimer laser ablation. Nickel targets are ablated by excimer laser pulses in a laser fluence range between 1 and 6 J/cm2, with the upper limit exceeding the threshold of phase explosion (5 J/cm2). The surface pressure is determined with a polyvinylidene fluoride (PVDF) piezoelectric t...

Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices.

We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures o...

Excimer laser fabrication of polymer microfluidic devices

Silicon has been a primary material for fabrication of microelectromechanical systems ~microfluidic devices in MEMS! for several decades. This is due to the fact that the MEMS techniques were derived from those used for microfabrication in the semiconductor industry. These techniques are well developed, and can be readily applied for silicon based MEMS fabrication. Nowadays, alternative manufac...